摘要
等径生长控制系统是单晶炉上的重要组成部分,其性能对于单晶的生长至关重要。以80C196KC单片机作为控制系统的核心部件,采用PID算法以及其他的软硬件设计,实现了一整套单晶炉生长控制的设计方案。
Equal diameter growing control system is the important component of Silicon Crystal Growing Furnaces. The performance of Equal- diameter growing control system is very important to the silicon crystal growing process..We implement a project for controlling silicon crystal growing which using 80C 196KC chip as its core, adopting PID arithmetic and designing some other hardware and software.
出处
《电子工业专用设备》
2007年第4期49-52,共4页
Equipment for Electronic Products Manufacturing
关键词
单晶炉
80C196KC
等径控制
Single-crystal Furnace
80C 196KC
Equal-diametre control