圆柱度的三点法测量技术

Measurement techniques of cylindricity with three-point method

本文针对圆柱度误差的精密测量,提出了一种可分离截面圆度误差、截面半径差和截面最小二乘圆心初始位置并重构出被测圆柱形貌的方法,即三点法圆柱度误差分离与重构技术。据此方法,只要拾取3个传感器在各测量截面上的输出信号,就可以获得各截面上的测点在绝对坐标系内的位置,实现圆柱度的精密测量。同时还可以得到回转轴的纯回转运动误差和测量架的直行运动误差。

Aiming at precision measurement of cylindricity, this paper puts forward a kind of method which can separate the cross-section roundness error, the radius error of different cross sections, the initial coordinates of least square centers of measured cross sections and can reconstruct the pattern of the measured cylinder, i.e. the three-point method cylindricity error separation and reconstruction technique. According to the established mathematical model and the proposed technique, as long as the output signals of three probes on the measured cross-sections are obtained, the coordinates of measurement points of different cross sections in absolute coordinate system can be achieved and the precision measurement of cylindricity is realized. The pure rotary motion error of the swiveling table and the straight motion error of the measurement device can be simultaneously separated and obtained as well.