超细微粒空气过滤纸

ULPA Filter Paper

详细论述了与大规模和超大规模集成电路相关的无机纤维空气过滤纸的国内外现状，超细微粒空气过滤纸的特性、小试和生产试验的工艺技术条件。

ULPA filter paper is made from ultra fine glass fibers and ceramic fibers with the addition of strengthening agents (e.g.phenol formaldehyde resin,EVA and acylic resin),dispersing agents (e.g.mineral polyacid) and waterproof agents (e.g.silicone oil) on the hot air drying fourdrinier.Present situation at home and abroad of inorganic fiber air filter paper used for the manufacture of large scale and super large scale integrated circuit was introduced.The characteristics of ULPA filter paper and the instrument,facilities and process technology for manufacturing this paper grade both in laboratory scale and pilot plant were described.A comparison of technical specifications between our product and the products from abroad was presented.