类金刚石膜的制备技术及应用领域概况

Review of Preparation and Application of Diamond-like Carbon Films

简要介绍了类金刚石膜的结构,综述了类金刚石膜的传统制备方法以及其制备方法的基本原理和优缺点,同时介绍了几种近年发展起来的新兴制备方法,与传统制备方法相比,它更能提高膜的沉积速率和质量。总结了类金刚石膜在机械、电子、光学、医学、航空等领域的应用状况。同时指出,随着DLC技术上的成熟,其必将在更多领域发挥越来越大的作用。

The structure of the diamond-like carbon（DLC） film is briefly discussed. The conventional preparation methods of DLC films and their basic principles, the merits and defects were reviewed. Some new preparation methods which were developing recently were introduced. Compared with the conventional methods, it can increase the deposition speed and quality. The applications of the films in the fields of machinery, electronics, optics, medicine and aviation, etc were summarized. And point out, with the developing of the technology of the DLC, it will exploit the particular advantages in more and more fields.