散射式激光表面粗糙度测量仪

Laser Scattering Surface Roughometer

介绍一种基于激光在粗糙表面散射原理的便携式激光表面粗糙度测量仪。它是以小型的半导体激光器为光源，在光路结构上采用远心光路，并用半散射带法处理经试件微观形貌调制的散射光带，使得测量对试件的放置位置要求低（允许的倾斜度Ｘ向为±２°，Ｙ向为±５°，允许的测量距离偏差为±２ｍｍ），测量范围大（Ｒａ值为０．００５～２μｍ），成功地解决了测量准确度高低与测量范围大小相矛盾的粗糙度测量问题。配置附件可对有特殊形面的试件和内表面的粗糙度进行测量。该仪器结构简单、操作方便，准确度能满足生产实际的需要，适合于生产现场进行快速、无损检测。

A portable laser roughometer based on the principle of laser scattering on machining surface is described. The laser diode and novel telecentric optical system are adopted and the light scattering band modulated from surface of sample is processed by the way of half scattering band of light. So, the measuring result is insensitive to the position of sample (tolerence tilt: X ≤±2 °, Y ≤±5 °;tolerence measuring distance error:±2 mm).The measuring range is wide ( R a value: 0.005～2 μm). The contradictory between better measuring accuracy and larger measuring range is solved effectively. Besides, sample which has special form and internal surface can be measured with different accessories. The instrument is simple in structure and easy to handle. This nondestructive testing device has sufficient measuring accuracy for practical uses.