谐振传感技术中光学激振拾振原理研究

The Applicable Research on the Optical Exitation and Detection Of the Resonators of the Resonant Sensing Technology

全光纤-谐振传感技术是80年代中期出现的一种新型传感技术。由于它兼有光纤、谐振传感技术和硅微结构的优点，因而被认为在航空、过程控制和医学等领域尤其具有重要的应用价值。硅微细加工工艺、光学激振和拾振是这一技术研制中的三个关键问题。本文将就方形硅膜片光学激振和拾振的原理进行探讨和分析。

An all-optical fibre resonant sensing technology is the new sensing technology which was developed in the middle of the eighties. Because it has advantages of an optical fibre sensing, a resonant sensing and silicon micromachined structure sensing technology at the same time so that it is considered more appropriate for applications in avionics, process control and medcine. Silicon micromachine, optical excitation and detection are three of technical barriers during this kind of technical development.The mecharusm of the optical excitation and detection of the square resonant chip is discussed.