摘要
微机械研究是近年来世界各国科技界研究的一大热点，其中的微测量、控制成为微机技术群的一个重要课题。本文介绍一个为配合压电型微驱动器的研制而设计的高精度的微位移测量、控制系统，它由显微镜ＣＣＤ视觉系统、Ｄ／Ａ及精密直流电压放大电路等环节组成，控制精度达到了０．
The study of micro mechanics is one of the hot points of science and technology in the world. Micro measuring and controling has become the most important research field of micro mechanics. This paper introduces a high precision micro displacement measuring and controling system for the design of the piezoelectric micro actuator. This system consists of a microscope CCD vision system, D/A and precision D.C. amplifier. The controling accuracy can reach o.7μm.
出处
《现代计量测试》
1997年第1期11-14,共4页
Modern Measurement and Test
