摘要
介绍了一种基于光散射原理的便携式激光表面粗糙度测量仪。它采用半导体激光器为光源，以远心光路结构接收、处理经粗糙表面调制的散射光带，成功地解决了粗糙度测量精度高低与测量范围大小相矛盾的问题。仪器结构简单、操作方便、测量效率高。
A portable laser surface roughometer based on the principle of laser scattering on machining surface is described The laser diode and novel telecentric optical system are adopted and the light scattering band modulated from surface of sample is processed The contradiction between better measuring accuracy and larger measuring range is solved effectively The instrument has high measuring efficiency and is simple in structure to handle easily This non contact measuring device has sufficient measuring accuracy for practical uses
出处
《计量学报》
CSCD
北大核心
1997年第1期28-31,共4页
Acta Metrologica Sinica
关键词
表面粗糙度
测量仪
半导体激光器
Surface roughness measurement
Light scattering
Laser diode
