摘要
扩散硅压力传感器具有良好的性能和稳定性。本文说明了扩散硅压力传感器的工作原理,详细分析了对其进行温度综合补偿的电路,然后结合实例,介绍了压力传感器的接口电路和对其进行非线性校正的方法。
The diffusion silicon pressure transducer has perfect performance and stability. In this paper, the working principle of the diffusion silicon pressure transducer is explained, the comprehensive temperature compensation circuit is analyzed in detail, and then, the interface circuit of the pressure transducer and the method for nonlinearity calibration are introduced.
出处
《仪器仪表用户》
2007年第5期49-51,共3页
Instrumentation
关键词
扩散硅
温度补偿
非线性校正
diffusion silicon
temperature compensation
nonlinearity calibration
