摘要
以光切法的测量原理为基础，应用传统双管光切显微镜、CCD摄像装置、虚拟仪器及图像处理技术开发了表面粗糙度检测系统。详述了系统的硬件构成原理和核心器件CCD的选用方法；应用虚拟仪器开发平台LabVIEW及其视觉应用功能开发出检测系统的软件程序，运用图像处理技术从光切显微图像中提取出表面轮廓信号计算粗糙度评定参数。该检测系统能够实现表面粗糙度的自动、快速、多参数测量，通过与触针式粗糙度仪进行测量对比实验，论证了该检测系统能达到满意的精度，测量范围是：0.4～40μm。
The paper presents a surface roughness measurement system which is based on light section principle and consists of conventional light section microscope and CCD camera as well as image processing software. The system configuration and the method of choosing CCD are introduced in detail. Virtual instrument technique and vision function are applied to develop the software. Using the measurement system various surface roughness parameters can be measured automatically and fast. Comparing the measurement results with that of stylus instrument, it is proved that the system has a satisfying measurement precision. The height of surface profile, which can be measured in the system, ranged from 0.4～40μm.
出处
《电子测量技术》
2007年第4期184-187,共4页
Electronic Measurement Technology
关键词
表面粗糙度
光切显微镜
图像处理
虚拟仪器
surface roughness
light section microscope
image processing
virtual instrument
