摘要
利用微波等离子体方法在硅微尖阵列上生长了金刚石膜，并利用SEM和X射线衍射对金刚石膜进行了研究．
The diamond film on the silicon tips array was deposited by MW-PCVDtechnique. The samples obtained were investigated by SEM and X-ray diffraction technique. Itis shown that the diamond film is (111) oriented. The results are discussed.
基金
吉林大学超硬材料国家重点实验室资助
