摘要
厚膜压力传感器为新型应变式压力传感器.具有工作温度范围宽、耐腐蚀、蠕变小、漂移小、成本低廉、性能/价格比高等特点.本文介绍其设计原理、构造、工艺,并对厚膜应变电阻工艺与力敏特性的影响进行了讨论.此外,对传感器的主要性能指标及应用也作了必要介绍.
A new type strain pressure sensor which has the advantages of high operation temperature, good stability and accuracy, less hysteresis and creep, low cost, is described in this paper. The working principle, structure design,, process, and the correlation between the processes of thick film strain resistance and the characteristic of the sensor is discussed. The main performances and applications of the new sensor is also introduced.
出处
《传感器世界》
1997年第3期17-22,共6页
Sensor World
