摘要
用化学镀的方法制取了NiP/CoNiP薄膜并将样品进行真空热处理。用XRD、VSM、EDS等测试手段分析了热处理影响薄膜结构和磁性能变化的原因。结果发现,热处理使薄膜的结构发生了由α-Co向β-Co的同素异构转变;经热处理后晶粒尺寸长大到30 nm左右;经350℃热处理后薄膜的矫顽力升高到5.57×104 A/m;经400℃热处理后矩形比达到0.28。
NiP/CoNiP thin films were prepared by electroless deposition and were heat-treated in the high temperature vacuum tube. The properties of the thin films were characterized by EDS, XRD and VSM, the reasons about change of structure and magnetic properties of the films were analysed. The results indicate that the heat treatments make the structure of the thin films change from α-Co to β-Co; The grain size growthes to about 30 nm after heat treatment; The coercivity of the films rises to 5.57×10^4 A/m by heat treatment at 350 ℃; The squareness ratio of the films get to 0.28 by heat treatment at 400 ℃.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2007年第6期45-48,共4页
Electronic Components And Materials
基金
北京市科学技术委员会基金资助项目(Y0404013040211)
关键词
电子技术
薄膜
热处理
磁性能
结构
electron technology
thin film
heat treatment
magnetic properties
structure
