二维硅微机械陀螺的研究

Research on Two-dimensional Silicon Micro-machined Gyroscope

报道了一种依靠载体的旋转作为驱动,能敏感载体偏航角速度与自转角速度的二维硅微机械陀螺的原理、硅摆制作、敏感元件封装和检测。分别用仿真器和速率转台对其二维特性进行测试,结果证实该硅微机械陀螺能够敏感旋转载体的偏航和旋转体自身的角速度,比例系数随旋转角速度增加而增加。陀螺性能测试说明这种陀螺达到中等精度的使用要求。

This paper presents a novel type of two-dimensional silicon micro-machined gyroscope that is driven by the rotating carrier. The theory, fabrication process of Si pendulum, fabrication process of the sense element, measurement results are described. The two-dimensional performance of the rotating carrier are measured at emulator and rotating table. The proportional coefficient increase with the increase in rotating rate of the emulator. Results show that the gyroscope can be used to sense the yawing and rotating angular rate of the rotating carrier with a medium precision.