抛光型SLAM系统灵敏度研究

The Research of the Sensitivity About the Opto-polishing Layered-media Base-on SLAM

以片式电子材料元器件作为无损检测分析对象,以提高激光扫描声学显微镜(SLAM)系统灵敏度为目标,详细分析了入射声波在抛光型分层介质中的传播规律,建立了抛光型样品自由界面动态波纹振幅数学模型。经综合分析获得了提高系统响应的方法,为进一步改进SLAM提供了理论依据。

With the purpose of increasing the sensitivity of SLAM, slice electron-materials and elements are selected in Non-destructive Testing. Sensitivity increased of SLAM is target. The transmission law of a planar ultrasonic wave in the Opto-polishing layered-media is rigorously analyzed and a mathematical model of the amplitude about dynamic ripples on the polished interface is found. These results can be used to upgrade design and nondestruc- tive destructive evaluation of the scanning laser acoustic microscope （SLAM）.