薄膜定量分析中的Auger线型分析方法

Auger line shapes analysis methods for quantitative determination of films

采用Ａｕｇｅｒ线型分析方法因子分析方法和已知组元强度的定量解谱技术，对电子束辅助Ｎ离子注入Ｓｉ和磁控溅射方法制备的ＴｉＮｘ薄膜的高分辨率俄歇电子能谱（ＡＥＳ），进行了定量分析．

Two Auger line shapes analysis methods, the factor analysis method and the quantitative determination method of the intensities of known components, were applied to the quantitative determination of TiN x films and the composition depth profiles of N implanted in Si assisted by electron beams. The effects of chemical states on Auger line shapes and the effective and applicable ranges are discussed here.