用发射光谱方法研究微波ECR等离子体电离特性

Study of ionization properties of microwave ECR plasma by emission spectroscopy

记录并标识了氩气微波电子回旋共振（ＥＣＲ）等离子体在可见光区的发射光谱谱线；测定了氩原子谱线和离子谱线强度随微波功率和氩气气压的变化关系．指出随着微波功率的增加。

The emission spectral lines of Ar microwave ECR plasma in visible range were recoded and recognized. The intensities of Ar and Ar + emission spectral lines vary with microwave power and gas pressure, and they increase and tend to be saturated while microwave power increases.