恒流法制备不同孔径高度有序阳极氧化铝模板

Preparation of Highly Ordered Anodic Aluminum Oxide Templates with Different Pores by Constant Current Density

由于传统恒压氧化方法的局限性,为得到不同孔径高度有序的阳极氧化铝模板(AAO),采用改进的恒电流密度法,分别在硫酸、草酸和磷酸电解液中制备了不同孔径的阳极氧化铝模板,并借助扫描电子显微镜(SEM)观察了膜的微观形貌,研究了电解液、电流密度等对膜的影响。结果表明:利用恒电流密度法可以制得孔径在30～300 nm之间,厚度在20～120μm之间,高度有序的AAO模板系列。电解液和电流密度是影响AAO模板孔径和有序性的主要因素。

To obtain highly ordered anodic aluminum oxide （AAO） templates with different pores. AAO templates with different pores were prepared by constant current density process instead of constant voltage oxidation process in sulphuric acid, oxalic acid and phosphoric acid respectively. The morphology of AAO was investigated by scanning electron microscope （SEM）. The affecting factors involved in the templates were concluded from solution, current density and voltage. The results showed that the templates with diameters of 30～300 nm and thickness of 20～120 μm prepared by constant current density process have highly ordered pores, and the main factors of the AAO templates are the kind of electrolytes and the value of current density.