摘要
介绍了一种用于超精加工分析用的宽范围原子力显微镜．其垂直方向和水平方向的分辨率可达ｎｍ级，测量范围可达１４０μｍ×１４０μｍ．采用了探头扫描方法和双扫描工作模式，扩大了这种测量方法的工程应用范围．给出了金刚石刀具钝圆半径与精密玻璃光栅和超精密抛光陶瓷的轮廓形貌的测量结果．
An atomic force microscope with wide range scanning for superfinishing analysis is described. The resolutions in both the vertical and horizontal directions can reach nm level and the scanning ragne is around 140 μm×140 μm. As the probe scanning method and double scanning modes are adopted, the scope of application of such a measuring method in engineering is broadened. Measurement results of the edge radius of sharpened single crystal diamond tools, the morphology of the precise glass optic grating and the polished ceramic surface are given.
出处
《华中理工大学学报》
CSCD
北大核心
1997年第1期1-4,共4页
Journal of Huazhong University of Science and Technology
基金
高等学校博士学科点专项科研基金
国家自然科学基金
关键词
超精密加工
金刚石刀具
原子力显微镜
加工精度
superfinishing (microstoning)
edge radius of diamond tool
atomic force microscope with wide range scanning
