多层氧化物薄膜气体敏感特性的研究

A Study of Gas Sensing Properties of The Multilayer Oxide Thin Films

报道了采用ＰＥＣＶＤ方法制备多层薄膜材料，研究了不同结构薄膜材料的气敏特性，制得了具有优越性能的ＮＯｘ。

We report that multilayer thin film material were prepared by means of PECVD method. Gas sensing propertise of the different that structure films were researched. The high performances of NOx,alcohol and TMA gas sensors were fabricated in this paper.