摘要
采用微波CVD法对硬质含金表面金刚石的形核和金刚石薄膜的沉积进行了探索性研究，用激光喇曼谱仪对金刚石进行表征。研究了在硬质合金工具衬底沉积金刚石薄膜的结合强度。
Diamond films necleus and its growth when deposited by microwave CVD on hard alloys are investigated. Diamond films are characterized by Raman spectra.Adhesion of diamond films and hard alloy is discussed.
出处
《兵工学报》
EI
CAS
CSCD
北大核心
1997年第1期73-76,共4页
Acta Armamentarii
关键词
微波CVD
硬质合金
金刚石薄膜
microwave CVD, hard alloy, diamond films, adhesion
