摘要
综述了纳米多层膜的研究进展,包括多层膜超硬的原因、多层膜的种类、制备方法及结构和成分的检测手段,并提出纳米多层膜今后的研究方向和应用前景.
This paper reviews the progress in multilayer including explanation of super-hardness, series of muhilayer, synthesis of multilayer and testing ＆ analysis multilayer, as well as further research and application of multilayer.
出处
《材料研究与应用》
CAS
2007年第1期1-10,共10页
Materials Research and Application
关键词
纳米多层膜
调制波长
硬度
内应力
nano-multilayer
periodic thickness
hardness
stress
