二元编码光栅的误差扩散算法研究

Study on error diffusion algorithm of binary encode grating

为了研究二元误差扩散算法,采用计算机仿真的方法产生光栅模板用于位相测量轮廓术,分析误差扩散点数和误差分配系数对编码方法和测量精度的影响。结果表明,应用3种常见的误差分配系数用于产生正弦光场都具有较高的测量精度,三者间没有显著性差异。误差扩散点数对编码方法和相位测量精度的影响较小。实验证明,采用误差扩散编码后,系统综合误差可以控制在1%的等效波长以内,验证了二元误差扩散方法的可行性与精确性。

In order to study binary error diffusion algorithm, computer simulation is used to form grating templates which are used in the phase measuring profilometry. The influence of error distributing coefficients and the number of error diffusion points on the precision of encoding and phase measurement is discussed. The results indicate that with the three familiar kinds of error distributing coefficients, the three corresponding sinusoidal structured illumination formed all have relatively high measurement precision and there isn＇t obvious diversity among them. The influence of diffusion points number on the precision of encoding and phase measurement is relatively small. According to the experiment, the general error of the system can be controlled within 1% of the equivalent wavelength. As a result,the feasibility and accuracy of binary error diffusion method are proved.