P型SiC欧姆接触高温可靠性的研究进展

Study Evolution on the Ohmic Contact for P-type SiC Reliability in High Temperature

介绍了P型碳化硅(SiC)欧姆接触在高温应用时的可靠性问题。首先,对在P型SiC上实现欧姆接触的工艺方法进行了综述,讨论了如何克服费米钉扎等关键问题;其次,在了解如何实现欧姆接触工艺的基础上,研究了影响该材料高温稳定工作的原因。从材料、工艺两方面总结了如何提高接触可靠性的方法,并尝试性提出了改进思路。

In this paper reliability of ohmic contact for P-type is introduced in high temperature application.Firstly we describe numbers of technics and technology on the ohmic contact for P-type SiC ,which includes how to solve sixty-fourdollar question of the fermi pinning.Based on the ohmic contact technics we illuminate the material reliability which is affected by high temperature.So we summarize how to improve technical reliability on the ohmic contact through material and technics, and attempt to give the better way.