一种新型的Pt-NiO混合敏感膜全固态溶解CO_2传感器及其特性测量

A Novel All-Solid-State Dissolved CO_2 Sensor with Pt-NiO Mixed Sensing Film and Measurements of the Sensor's Characteristics

为了方便的测量溶解二氧化碳(CO2),利用室温下NiO对CO2的敏感特性,基于碳糊成膜方法,研制了一种新型全固态溶解CO2传感器.文章中,分析了传感器的结构和NiO敏感膜对CO2的敏感机理,测量了不同工作点和不同温度下传感器输出电压ΔVrs随着溶解CO2浓度变化的响应特性.实验结果显示,基于MISFET结构的Pt-NiO混合敏感膜溶解CO2传感器可以在室温下方便的检测溶解CO2浓度.

To measure the concentration of dissolved carbon dioxide, using the material NiO which is sensing to CO2 at room temperature,a novel all-solid-state dissolved CO2 sensor was developed based on the carbon-paste film forming. In this paper, the sensor structure and the sensing mechanism of NiO to CO2 were discussed. And the response characteristics of △ Vrs （the reference voltage shift ） versus the dissolved CO2 concentration which were bound at different biases and different textures were given. The experimental results show that the dissolved carbon sensor based on the MISFET structure with Pt-NiO mixed sensing film is feasible to determine the concentration of dissolved CO2 at room temperature.