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含氟聚酰亚胺有机聚合物波导的制备 被引量:5

Fabrication of Polymer Optical Waveguide Using Fluorinated Polyimide
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摘要 采用含氟单体4,4'-(六氟异丙基)-苯二酸酐(6FDA)、5,5'-(六氟异丙基)-二-(2-氨基苯酚)(6FHP)及二氨基二苯醚(ODA)合成了含氟聚酰亚胺共聚物材料,对材料的化学和光学性能进行了表征.共聚物材料在溶液状态下用旋涂法获得了较高质量的共聚物薄膜,并在此基础上采用先进的光波导工艺技术将该材料制备成条波导,测试结果表明该波导在光通信波段1550nm处的平均传输损耗小于0.66dB/cm,局部损耗在0.2dB/cm,进一步改进后有望获得性能优异的光电子器件. A novel fluorinated copolyimide was synthesized from fluorinated monomers 4,4'-(hexafluoroiso-propylidene)-diphthalic anhydride(6FDA), 2,2'-Bis(3-amino-4-hydroxyphenyl) haxafluoropropane (6FHP) and 4,4'-Diaminodiphenyl ether. The characteristics of this copolyimide in chemistry and photics were determined. High quality copolyimide fiim could be obtained by casting the copolyimide solution on glass plate. Then the copolyimide was made into waveguide by using advanced processing techniques. Test results at optical communication wavelength 1550 nm indicated that the waveguide transmission loss averages around 0. 658 dB/cm and could be as low as 0.2 dB/cm at some parts. Further improvement can be done to achieve high performance optoelectronic devices.
出处 《电子器件》 CAS 2007年第3期752-754,共3页 Chinese Journal of Electron Devices
基金 教育部重点项目资助(104196)
关键词 含氟聚酰亚胺 聚合物波导 传输损耗 fluorinated polyimide polymer waveguide transimission loss
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