微透镜填充因子快速检测方法

Filling factor fast detecting method for microlens array

本文提出了一种有效的微透镜阵列填充因子快速检测方法。文章从光的标量衍射理论出发,分析了连续浮雕微透镜阵列的衍射光斑分布与透镜子口径、透镜矢高之间的关系,推导出了微透镜阵列远场衍射光斑的理论模型,用该模型对不同填充因子的微透镜阵列为例进行计算机模拟分析,并且搭建了实验装置来获得实际的衍射光斑。结果表明,模拟光强分布与实际衍射光斑相当接近,在此基础上给出了微透镜衍射光斑分布与填充因子之间的半定量关系,为微透镜阵列的快速检测提供了一种有效手段。这种方法可以实现微透镜阵列的准确、简单、低成本的填充因子检测,极大地提高了生产效率,满足了实际测试的要求。

An effective and fast detecting method for microtens array filling factor is proposed in this paper. The relationship between the diffraction field of microlens array and lens diameter, sag height is analyzed, and theoretical model is derived with the scalar diffraction theory. The formulation of diffraction field of microlens array is established, computational simulation is carried out for arrays with different filling factors using this formulation, and experiment systems are constructed to obtain actual diffraction field. The simulation intensity distribution calculated definitely approaches the actual diffraction field through contrast. Based on the above analysis, a semi-quantificationally relationship between diffraction field of microlens array and filling factor is given, and a new effective and fast detecting method for microlens array is presented.