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新一代晶圆划片技术 被引量:3

Next Generation Wafer Dicing Technology
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摘要 随着半导体及电子业技术的发展和消费市场无止境的需求,传统的划片(Dicing)技术,在许多方面已经无法满足业者的需求,代之而起的是激光划片(Laser Dicing)技术。而激光固然有某些优势,却亦有其缺陷。无论如何,激光引领划片的潮流,来势汹汹,难以抵檔。 With the development of semiconductor and electronic technologies and the increasing demand of consumption market, the conventional dicing technology can't meet the challenges and requirements in many ways. Thus, laser dicing technology is booming. Though it has some advantages, there still exist some problems. Anyway, it's a trend that laser dicing will become the main stream of the next generation wafer dicing.
出处 《电子工业专用设备》 2007年第6期31-34,48,共5页 Equipment for Electronic Products Manufacturing
关键词 划片 激光划片 微水刀激光 水导激光 超薄晶圆 Dicing Laser dicing Laser Micro Jet Water Jet Guided Laser Ultra thin wafer
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参考文献5

  • 1Dr. Bernold Richerzhagen and Delphine Perottet. Low-K SDS solutions[Z]. 2006.3.16
  • 2Dr. Yasushi Kozuki and Dr. Bernold Richerzhagen. Gentle dicing of thin semiconductor materials by waterjet-guided laser [C]. Proceedings of the 4th international congress on Laser Advanced Materials Processing,2005.
  • 3Dr. Bernold Richerzhagen. Synova application notes [Z]. 2002-2006.
  • 4Dr. Weimin Liang. Thin wafer dicing Issuese and New Technology Cost of Ownership [Z]. FUTURE FAB International: Issue 19.
  • 5John F Ready, HIA Handbook of Laser Material Processing[Z].

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