摘要
简要分析半导体设备中干扰产生的原因、危害及一般抗干扰的原则;从干扰形成的三要素入手,重点介绍半导体设备设计、制造及维修中一些行之有效的抗干扰的方法。
This paper briefly analyzes the interference reason, the harm and the general anti-interference principle; making an emphasis on some effective anti-interference method in semiconductor equipment design, manufacturing and service.
出处
《电子工业专用设备》
2007年第6期40-43,共4页
Equipment for Electronic Products Manufacturing
关键词
干扰源
干扰途径
干扰易受体
抗干扰措施
Interference source
Interference way
The easy acceptor of interference
Anti-interference method
