摘要
随着深紫外准分子激光光刻技术的发展,所用CaF2光学晶体镜头材料的加工对传统的冷加工技术提出了挑战。本文结合CaF2晶体的基本性质,对其加工技术进行了极大的改进。通过控制合适的工艺参数,采用特殊的加工方法可以加工出高质量的CaF2光学晶体。
With the development of far UV quasi - molecule laser lithography technique, the processing of CaF2 optical crystal lens material challenged traditional cool processing techniques. Combined with the fundamental properties of CaF2 crystal, the processing techniques was improved a lot in this study. Experimental results showed that high - quality optical crystals were processed by optimum technology parameters and the special processing method.
出处
《长春理工大学学报（自然科学版）》
2007年第2期97-99,共3页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
CaF2晶体
切割
抛光
晶体加工
CaF2 crystal
cutting
polishing
crystal processing
