基于面向服务架构的分布式开放控制系统

A distributed open control system based on service oriented architecture

提出了一种基于面向服务架构（SOA）的分布式开放控制系统模型。整个参考模型由设备抽象层、基本控制模块层、服务层和应用层四层组成。各层内部采用面向对象的方法进行设计，各层相对独立，层间的耦合性比较小。服务层包含了所有分布式子系统的服务抽象和封装，以服务的方式供应用层使用。这种控制系统模型，开放性好，各个模块的可重用性强，开发效率高。使用这种框架，成功开发了IC工艺装备中的刻蚀机硅片传输原型系统，而且取得了很好的效果。

This paper proposes a new SOA-based distributed open controller system model. The whole model consists of four layers, the abstract device layer, the basic control layer, the service layer, and the application layer. Each layer is designed using object oriented pattern. The layers are relatively independent from each other. The service layer contains all of the service abstraction of the distributed subsystems for application layer. This control model improves the system＇ s openness and development efficiency, and makes the subsystems reusable. Based on it, a prototype of wafer transfer system in etching tools in IC industry has been developed successfully and the system performs well.