摘要
纳米压痕试验中对测试结果产生影响的因素很多,如果计算各个分项相当困难。采用重复性限和复现性限对熔融石英样品上的纳米压痕硬度和模量的标准不确定度进行了评定。
It is difficulty to calculate subentry of uncertainty in nanoindentation because there are many factors. Compound estimate uncertainty of instrument hardness and young＇s modulus on fused silicon were obtained.
出处
《理化检验（物理分册）》
CAS
2007年第6期287-289,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
上海市科委纳米专项(0452nm089)
关键词
重复性限
复现性限
纳米压痕
不确定度评定
Repeatability
Reproducility
Nanoindentation
Uncertainty estimation
