双金属微悬臂梁的选材及热机械性能分析

Bi-Material Microcantilever’s Thermomechanical Performance and Materials Selection: An Analysis

由微悬臂梁结构组成的红外焦平面阵列(FPA)是基于微机电系统结构的非制冷型红外成像系统的核心技术。通过对Al/SiNx双材料体系的理论分析,得出了微悬臂梁的热机械性能与双层梁的厚度比之间的关系。

Micro-cantilever-based infrare.d focal plane array is the key technology to be reckoned with in uncooled infrared imaging system based on MEMS. Thermo-mechanical response of the cantilever as a function of thickness ratio between Al and SiNx films for thickness of SiNx film is 0.5μm. In this paper, the author analyzes thermo-mechanical performance on micro-cantilever, and discusses selection of micro-cantilever＇ s materials.