超磁致伸缩二维精密工作台研究

Research of a magnetostrictive XY stage

在超磁致伸缩驱动器的基础上,以柔性铰链机构作为传动部件,设计了创新结构的二维精密工作台。应用ANSYS软件对所设计的柔性铰链机构进行了应力和位移分析。设计了闭环控制系统来控制工作台的输出精密和响应速度。经分析,X和Y方向的最大位移量可达0.2 mm。

Accurate displacement output of a xy stage was achieved by employing two magnetostrictive actuators associated with flexure-hinge based displacement amplifiers. The static analysis of the flexure-hinge was undertaken through finite element analysis. A control system based on a PID feedback controller was then formulated, for achieving accurate positioning of the xy stage. From the analysis result, the max displacement output of the both direction can reach 0.2 ram.