微细加工中的微型铣床、微刀具磨损及切削力的实验研究

Micro-milling machine tool,micro-tool wear and cutting forces in micro-machining

由于微机电系统(Micro Electro Mechanical System,MEMS)在微小零件加工中存在不足,微细铣削加工作为一项补充技术正在日益受到人们的重视。介绍了研制的微型精密三轴联动立式铣床(300 mm×300 mm×290 mm)的系统构成,开发了中文控制软件并集成了视频采集系统,此设备在薄膜型工件(膜厚65μm)的微槽加工中取得了满意的效果(膜厚方向上材料去除率90.7%,成品率大于80%)。对微径端铣刀进行了力学特性分析,并通过刀具磨损试验分析了微径硬质合金TiA1N涂层及非涂层铣刀的磨损机理。最后通过槽铣硬铝2A12的试验研究了切削用量(主轴转速、背吃刀量和每齿进给量)对微细铣削力的影响,为微细铣削切削机理的深入研究奠定了基础。

The system construction of a 3-axis precision micro-milling machine tool with overall size 300 mm× 300 mm× 290 mm was presented. The control software package integrated with a video collecting system in Chinese was developed to facilitate risers＂ operation. This micro-milling machine tool has been successfully used in manufacturing a micro-groove in film work piece （the film thickness is 65 /μm, material removal rate of the micro-groove along the film thickness is 90.7%, surface roughness of the bottom of the micro-groove is 0. 365 /μm, and the yield is more than 80%）. Furthermore, the experiments with the TiAIN coated and uncoated carbide micro-end-milling tools were carried out to analyze the mechanical characteristics and wear mechanism of the tool. Finally, the effects of cutting parameters （spindle speed, cut depth and feed per tooth） on cutting forces were discussed. The works mentioned above are the foundation of next research on the mechanism of micro-end-milling.