纳米压痕系统中施载/扫描传感器的设计

The Design of Load/Scan Sensor in the System of Nanoindentation

简介纳米压痕系统的基本原理及其关键部件施载传感器和扫描传感器的设计方法。最后,阐述施载/描扫集成结构的实现。

At first, the paper introduces briefly the basic principle of nanoindentation, then introduces the design methods of the key loading sensor and scanning sensor, finally expounds the realization of the integrated load/scan sensor.