声电荷输运延迟线

Acoustic Charge Transport Delay Line

声电荷输运技术是80年代初出现的一种新型高频高速信号处理技术，是模拟信号处理领域的重要发展方向。文内报道了声电荷输运延迟线的设计考虑、器件结构和制作，讨论了所采用的一些关键工艺，给出了器件性能。声电荷输运延迟线样品具有1μs的延迟时间，声表面波频率为358MHz。

Acoustic Charge Transport (ACT) technology which appeared at the beginning of 1980' s is a new type of signal processing technology with high frequency and high velocity, and is the main developing trend in analogue signal processing field. In this paper, the design and fabrication of ACT delay line are reported. Some key techniques are discussed. Excellent performance of the experimental device has been achieved: Tdelay≈ 1 Ps operating at the surface acoustic wave (SAW) clock frequency of 358 MHz.