静电场中电子轨迹的三维计算机模拟

Fully Three-Dimensional Simulation of Electron Trajectory in Electrostatic Field

本文讨论了静电场中电子轨迹的三维计算机模拟．给出了相应的计算公式．文中还对几种轨迹存在解析解的三维静电结构进行了计算．结果表明，本文所述方法精度较高，能满足电子光学ＣＡＤ的实际需要，是数值求解非轴对称静电结构下电子轨迹的有效方法．

In present paper the problem of calculating electron trajectories in an electrostaticfield is discussed. A set of formulae is given. Three-dimensional problems involving simple electrode configurations,for which the trajectories can be claculated analytically,are used. The resultsshow that the accuracy is hith enough and the algorithm is suitable for tracjectory calculation inasymmetric configuration.