基于微梁谐振原理的相对湿度检测技术

Relative Humidity Measurement Technology Based on Microcantilever Resonance

提出了一种基于微梁谐振原理的相对湿度检测方法．建立了微梁谐振频率与环境相对湿度的函数关系，通过检测谐振频率可以测量环境相对湿度．利用压电微梁直接激励法进行实验，得出了30％～80％湿度范围内微梁谐振频率与相对湿度的关系曲线．经实验验证，基于谐振原理的微梁湿度传感器有良好的精度和重复性，分辨率可达0．2％RH，精度优于±2．0％RH．微梁湿度传感器体积小、响应快、精度高，在微机电系统和微全分析系统中有广泛的应用前景，

A novel relative humidity measurement method based on microcantilever resonance was presented to construct the theoretical relationship between the resonant frequency and the relative humidity. The ambient relative humidity can be detected by measuring the resonant frequency. Experiments were conducted with pi- ezoelectric microcantilever under direct excitation. And the relationship curve between the resonant frequency and relative humidity in a range of 30 %--80 % was obtained. The results show that the microcantilever reso- nance-based humidity measurement method can achieve the resolution of 0.2%RH and the precision of ± 2.0 % RH. This kind of humidity sensor has the advantages of small volume, fast response and high precision, and therefore has a good foreground in micro electromechanical system（MEMS） and micro total analysis systems （μ-TAS）.