摘要
从多层弯曲磁芯微执行器的模型及原理出发,应用静磁执行器的吸合方程,分别用磁动势控制模型和磁通控制模型对多层弯曲磁芯微执行器的吸合现象进行了理论分析.计算及仿真结果表明:多层弯曲磁芯微执行器存在临界吸合角度,磁动势控制模型的临界吸合角度约为其最大旋转角度的44%;磁通控制模型的临界吸合角度约为其最大旋转角度的72.35%.磁动势控制实验结果与理论计算值误差约为8%.
Based on the magnetic pull-in equations, pull-in phenomena of the ideal mode were analyzed using the magneto-motive-force （MMF）-controlled model and the flux-controlled model. Calculation and simulation results suggest that there is critical pull-in angle in multilevel meander magnetic microactuator： under the con- dition of the MMF-controlled model, the critical pull-in angle is about 44% of the maxim rotating angle of the system; while under the condition of the flux-controlled model, the ratio of the critical pull-in angle to the maxim rotating angle is 72.35 %. The error of the critical pull-in angle between MMF-controlled experimental result and the theoretical one is only about 8 %.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2007年第2期98-101,共4页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(10476019)
