微加工中一种新型刻蚀深度实时检测系统

A Novel Real Time Etching Depth Testing System for Micro Fabrication

实现了一种新型刻蚀深度实时检测系统，整个系统对温度漂移，气体流动与外界振动等环境因素极不敏感，系统测量误差小于０．９８％，实现了在真空环境下刻蚀深度的实时监视与检测。

A novel real time system for etching depth measurement is demostrated. The system is not sensitive to instability, temperature variation and gaseous flow. The measurement error is small than 0.98%. We realized the real time test of etching depth in vavuum environment. This has practical significance to binary optics micro fabrication.