摘要
研究了液相基底温度对铝(Al)薄膜中具有准周期特征的带状有序结构的影响.实验发现,随着温度的升高,组成带状有序结构的矩形畴块平均长度先增大,随后减小.当沉积条件发生改变时,铝薄膜可呈现近似透明或金属色泽,并且在此两类薄膜中均可观察到带状有序结构.研究表明,硅油基底的物理特性随温度的变化对薄膜中内应力分布及微观结构有着重要的影响.
The temperature dependence of the band-shaped ordered structures with quasi-periodic characteristics, existlng in an aluminum （A1） film system deposited on silicone oil substrates, was studied. It was found that the aver- age length of the rectangle-shaped domains in each band increases with increasing substrate temperature at first; then it decreases. The ordered structures were observed in both transparent and nontransparent film systems, de- pending on the different deposition conditions. The observed phenomena suggest that the internal stress patterns as well as the microstructures of the films depend mainly on the temperature dependence of the physical property of the silicone oil substrates.
出处
《浙江大学学报（理学版）》
CAS
CSCD
北大核心
2007年第4期409-413,共5页
Journal of Zhejiang University（Science Edition）
关键词
基底温度
硅油
A1薄膜
内应力
substrate temperature
silicone oil
aluminium thin film
internal stress
