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一种非致冷光读出红外成像阵列器件的设计 被引量：2

Design of Uncooled Optically Readable Infrared Imaging Array Devices
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摘要 提出了一种具有“双材料梁-微镜一体化”特征结构的光读出红外成像阵列器件。该特征结构集成了红外敏感、调制和输出读出可见光信号的双重功能。通过研究相关性能,完成了像素单元尺寸的优化设计。理论计算表明,其关键性能指标的热-机械灵敏度和噪声等效温差分别为2.14×10-3rad/K和2.94 mK。 A novel optically readable infrared imaging array device with ＂bi-material beam micro-mirror integrated structure＂ pixels has been proposed. The integrated structure pixel not only is sensitive to infrared radiations, but also can modulate and output readable visible light. The geometric parameters of the integrated structure have been designed and optimized by investigating some relative performances. Thermal-mechanical sensitivity and NETD of the device designed are estimated as 2.14×10^-3 rad/K and 2.94 mK, respectively.
作者 杨广立 冯飞 熊斌 王跃林
机构地区 中国科学院研究生院 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
出处 《半导体光电》 EI CAS CSCD 北大核心 2007年第3期327-330,337,共5页 Semiconductor Optoelectronics
基金 国家自然科学基金资助项目(60407013) 上海应用材料研究与发展基金资助项目(065A04)
关键词 双材料梁-微镜一体化 热-机械灵敏度 热时间常数 噪声等效温差 光读出红外成像阵列器件 bi-material beam micro-mirror integrated structures thermal-mechanical sensitivity thermal time constant noise equivalent temperature difference（NETD） optically readable infrared imaging array device
分类号 TN215 [电子电信—物理电子学]
  • 相关文献

参考文献11

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  • 3冯飞,焦继伟,熊斌,王跃林.一种新颖的基于MEMS技术的光读出热成像系统性能分析与制作[J].红外与毫米波学报,2004,23(2):125-130. 被引量：6
  • 4Ishizuya T,Suzuki J,Akagawa K,et al.160×120 pixel optically readable biomaterial infrared detector[J].Proc.IEEE MEMS,2002:578-581.
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二级参考文献20

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共引文献5

同被引文献14

  • 1冯飞,焦继伟,熊斌,王跃林.光读出热成像焦平面阵列的光学与热学设计[J].光学学报,2004,24(11):1543-1546. 被引量：1
  • 2潘亮,张青川,伍小平,段志辉,陈大鹏,王玮冰,郭哲颖.基于MEMS的光力学红外成像[J].实验力学,2004,19(4):403-407. 被引量：22
  • 3M Mao, T Perazzo, O Kwon, et al. Direct view uneooled micro-optomechanical infrared camera[ A]. IEEE International MEMS' 99 Conference, USA[ C]. 1999. 105 - 109.
  • 4Senesac L R,Corbeil J L, Rajic S, et al. IR imaging using uncooled microcantilever detectors [ J ]. Ultramicroscopy, 2003,97:451 - 458.
  • 5Feng Fei, Jiao Jiwei, Xiong Bin, et al. A novel all - light optically readable thermal imaging sensor based on MEMS technology[A]. Proceedings of IEEE Sensors[C]. 2003. 513- 516.
  • 6T Ishizuya, J Suzuki, K Akagawa, et al. 160 X 120 pixel optically readable biomaterial infrared detector [ A ]. Proceeding of IEEE MEMS[ C ]. 2002. 578 - 581.
  • 7Corbeil J L, Lavrik N V, Rajic S. Self - leveling uncooled microcantilever thermal detector[ J].APPLIED PHYSICS LETTERS, 2002, (81) : 1306 - 1308.
  • 8Yang Zhao, Minyao Mao, Roberto Horowitz, et al. Optomechanical Uncooled Infrared Imaging System:Design, Microfabrication, and Performance [ J ]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, (11): 136-146.
  • 9Tohru Ishizuya, Junji Suzuki, Keiichi Akagawa, et al. Optically Readable Bi - material Infrared Detector [ A ]. Proceedings of SPIE[ C]. 2001. 342 - 349.
  • 10Wood R A. Uncooled infrared imaging arrays and system: Monolithic silicon microbolometer array [ J ]. Semiconductors and semimetals, 1997, (47) :47 -51.

引证文献2

二级引证文献4

半导体光电
2007年 第3期

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