碳氟化合物等离子体聚合研究进展

Recent Progress in Plasma Polymerization of Fluorocarbons

本文综述了近年来碳氟等离子体聚合物研究的新进展,主要包括3个方面:(1)碳氟化合物的等离子体聚合反应历程;(2)碳氟等离子体聚合物的结构表征,着重介绍了电子能谱在表征其结构中的应用;(3)碳氟等离子体聚合物的应用领域。

The recent progress in plasma polymerization of fluorocarbonshas been reviewed.The content includes;(1)plasma deposition mechnism ofplasma fluorocarbons;(2)structure characterization of plasma-polymerized fluo-rocarbons mainly discussing the applying of XPS techniches;(3)the applica-tion fields of plasma-polymerized fluorocarbons.