恒电流密度法制备大孔径高度有序阳极氧化铝模板

Preparation of Highly Ordered Anodic Aluminum Oxide Template with Big Pore Diameter by Constant Current Density Process

采用恒电流密度法,分别在草酸和磷酸的电解液中制备了阳极氧化铝模板(AAO),借助扫描电镜(SEM)观察了膜的微观形貌,结合恒电压法制备的AAO模板,研究了电解液、电流、电压等对膜的影响,并且探讨了恒电压和恒电流密度法的形成机理。结果表明:利用恒电流密度法制得的模板孔径大约在80～200nm,厚度在30～100μm,并且孔径均匀,有序性好。

Anodic aluminum oxide （AAO） is fabricated by constant current density process in oxalic acid and phosphoric acid electrolyte respectively. The morphology of AAO is investigated by scanning electron microscope （SEM）. Based on the AAO template which is fabricated by constant voltage process, the affecting factors involved in template are concluded from solution, current and voltage. Furthermore, the mechanism of AAO template formed by constant voltage and constant current density is discussed. The results show that the template fabricated by constant current density process has highly ordered pores with diameters of 80~200 nm and thickness of 30-100/μm.