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对PECVD制备碳纳米管的研究和探讨

PREPARATION CARBON NANOTUBES RESEARCH AND DISCUSS OF PECVD
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摘要 高纯度和高产率的制备碳纳米管是碳纳米管研究的一个重点。目前制备碳纳米管的方法有电弧法、激光蒸发法、化学气相沉积法(又称CVD法)和模板法等。本文主要介绍采用PECVD化学气相沉积法制备碳纳米管,并对该种方法制备碳纳米管进行了系统的研究和探讨。 High purity and high produce to preparation carbon nanotubes is one of carbon nanotubes research's emphasos.At present, there are some ways to preparation carbon nanotubes, like electricity, laser light evaporation, PECVD, cyelostyle ways. and so on this paper mostly use PECVD to preparation carbon nanotubos, simultaneity systemly research and discuss on this way.
作者 沈宝平
机构地区 绍兴文理学院
出处 《大学物理实验》 2007年第2期1-5,共5页 Physical Experiment of College
关键词 PECVD法 碳纳米管 催化剂 PECVD carbon nanotube catalyst
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