热超声键合换能系统动力学特性的非线性检验

Study of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system

根据实际超声换能系统的振动测试,提出了热超声键合换能系统动力学特性的非线性检验方法,利用基于相空间重构的替代数据法,通过对换能杆末端的实测数据进行正确替代,并用非线性动力学的理论来检验其是否具有非线性.通过实验对超声换能杆末端轴向、俯仰、横向的振动时间序列的关联维数进行了准确的计算,从而清晰地描述了上述三个方向的动力学特性.所提出的方法有利于更好地认识超声键合换能系统,为建立更加合理的非线性动力学模型奠定良好的理论基础,有很好的应用价值.

Using high temperatures and ultrasonic, ultrasonic bonding is one of the main methods in the wire bonding technology of the MEMS. The vibrations of transducer were tested. Based on the phase reconstruction theory, identification of the nonlinear characteristics was developed. In comparison with the time series along the axial direction, pitching direction and the horizontal direction, the correlated dimensions have been calculated, clearly describing the nonlinear dynamic characteristics of the transducer. It is helpful for understanding of transducer and can be used as a guide for modeling of this complicated structure.