摘要
介绍一种偏转磁场和电场相平行的HCD枪(平行场枪)的研制结果。该装置由四个电磁场简化成只有一个磁极,结构简单、性能稳定、调试方便,实践证明是合理的。
A new--type hollow cathode discharge gun was developed for ion platingwith simple and rational design and stable performance, especially it is easyto debug. The gun is arranged as a deflecting magnetic field parallel to theelectric field, or an HCD gun of parallel fields. A satisfactory feature is thatfour electromagnetic fields in the old-type gun are now reduced to one, i. e.,the gun needs only one magnetic pole with no other magnetic focusing pole.
关键词
离子镀
阴极放电枪
空心式
ion plating
hollow cathode discharge gun
deflection
focusing