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制图外延法自组装有序纳米微结构的研究

Graphoepitaxy Self-Assembly Nano-Structure
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摘要 如何低成本、大规模地实现纳米材料的控制合成与组装一直是纳米加工中的热点问题。文中提出了制图外延法自组装有序纳米微结构的新方法,实现了对有序纳米微结构的调控。 How to produce materials with nano-structure at low cost and large scale is the hot problem of nano-machining. A new route toward fabrication of nano-structure: graphoepitaxy self-assembly is mentioned. Kinds of nano- structures can be made by this method.
出处 《机械工程师》 2007年第7期78-80,共3页 Mechanical Engineer
关键词 制图外延法 自组装 嵌段共聚物 graphoepitaxy self-assembly block copolymer
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