微机电系统用电铸镍铁合金的制备及其电磁性能

Composition and Electromagnetic Property of Elctrofomed Ni-Fe Alloys for MEMS

研究了电铸镍铁合金制备过程中工艺条件对电铸层成分的影响,获得含铁质量分数20%电铸层的最佳工艺条件为镀液硫酸亚铁含量6g/L、pH值2.5、温度55℃、电流密度3.5A/ dm^2;讨论了镀层形貌及电磁性能的变化关系。结果表明:制备的镀层表面光亮、结构致密,晶面为(111)、(220)、(200)。该铸镍铁合金矫顽力最小为2.95×10^(-2) A/m,表现出较强的顺磁性。剩磁力随着铸层铁含量的增大呈下降趋势,饱和磁化强度为IJ85合金的10%,具有优良的电磁性能。可以用于制造微型磁执行器与传感器元件。

The relationship between coating microstructure and electromagnetic properties of electroformed Ni-Fe alloys was studied： And the optimum process parameters to obtain Ni-20%Fe deposition were as follows： FeSO4·7H2O concentration 6 g/L; pH value 2. 5; current density 3. 5 A/dm^2 ; electrolyte temperature 55 ℃. The Ni-Fe deposit is bright and compact, the crystal-planes of the plating are （111）, （220） and （200）. Electrodeposited Ni-20%Fe has a strong paramagnetism effect with the smallest remanence of 0. 5 emu. The coercivity show a monotonic decrease with increasing Fe content in deposit, and the saturation magnetization is only 10M of that of the U85 permalloy, indicating that the electroformed Ni-20% Fe alloy has good electromagnetic property and could be used in MEMS actuator manufacturing.